An 8×8 CPW MKIDs developed for terahertz superconducting imaging array

China is planning to construct a 5-meter THz telescope named DATE5 at Dome A, Antarctica. This paper reports on the development of an 8×8 CPW microwave kinetic detectors (MKIDs) for the terahertz superconducting imaging array (TeSIA), which is an instrument proposed for the DATE5. The 8×8 CPW MKIDs, operating at 0.35THz, make use of TiN superconducting film of Tc approximately equal to 4.3K. The resonance frequencies of the MKIDs span the 4-5.575GHz band with an interval of 25MHz. The design, fabrication and characterization of the 8×8 CPW MKIDs are presented.