High-frequency magnetic properties of multilayer films for applications in solenoid inductor

High-frequency soft magnetic multilayer films with well-defined laminated structure were fabricated by alternating magnetron sputtering at room temperature with no external magnetic field applied. The satisfactory high-frequency magnetic properties and high resistivity were obtained even if the total thickness of the multilayer film increased to micro level. When used as magnetic core, these high-frequency soft magnetic multilayer films could effectively improve the inductance and quality factor of solenoid inductors.