N-layer screen printed ceramic on stainless steel based pressure sensor

In this work, an n-layer screen printed ceramic on stainless steel based pressure sensor has been designed, fabricated, and characterized as the foundation for high pressure and harsh environment applications. A few layers of dielectric ceramic films were deposited on a thin and flexible stainless steel diaphragm by screen printing and firing. Finite element analysis (FEA) method has been used to determine the distribution of four thick-film piezo-resistors which form a wheatstone bridge. The compatibility between the ceramic and the stainless steel, influenced by firing condition and CTE mismatch, has been studied. Microstructures of the dielectric ceramic layer were analyzed with SEM. Thermal shock and electrical test have been conducted to evaluate the performance of the pressure sensor.