Comparison of ZnO and Ti doped ZnO sensing membrane in bio-sensor applications

In the paper, the EIS structure with high-k ZnO sensing film has more responsive to H
⁺
relative to Na
⁺
and K
⁺
. The Ti doped ZnO sensing membrane annealed with RTA at 700°C shows a higher sensitivity of 57.56 mV/pH, higher linearity, lower hysteresis voltage of 2.79 mV and lower drift rate of 0.29mV/hr than the ZnO samples.