A high performance MEMS piezoresistive accelerometer for pathological tremor diagnostic system

Objective: In recent times MEMS piezoresistive accelerometers are widely used with the main focus of optimizing the device for its sensitivity. The proposed work reports the design of Microelectromechanical system (MEMS) piezoresistive accelerometer unit used for pathological tremor diagnostic system. Analysis: The accelerometer has been designed for the dynamic range of ±2g. A high performance device is constructed by improving the sensitivity. In proposed work two different structures are analyzed based on Eigen frequencies. Both the structures are simulated at six different Eigen modes. Results: The simulation result shows that structure 2 has better sensitivity compared to structure 1 of about 21.5mV. Conclusion: The sensitivity can be improved by varying the dimensions. But a careful tradeoff is necessary to balance the dimensions of the device and sensitivity.