A hybrid silicon-PDMS multifunctional neural probe

We demonstrate a 3-in-1 hybrid silicon-PDMS neural probe with electrochemical sensing, directional optical stimulation, and drug delivery capabilities to manipulate and record neural cell activities. Blue light with a wavelength of 450nm is coupled onto the probe by a grating coupler and delivered to the probe tip through a silicon nitride waveguide. Another grating coupler at the tip couples the light out and provides directional illumination near the center of a sensing electrode. A liquid channel is bonded on top of the silicon probe using a novel PDMS thin-film transfer process.