A tunable plasmonic color filter by nanomechanical stretch using MEMS electrostatic actuator

This paper reports an evaluation of electromechanical properties of the tunable plasmonic color filter by means of a nanomechanical in-plane motion of free-standing Al subwavelength grating. The maximum 707 nm pitch expansion was obtained at an applied voltage of 60 V, which provides a continuous peak shift of transmitted light. The frequency response was achieved up to 1 kHz.