A Monolithic Michelson interferometer with a large piston MEMS micromirror

We demonstrated a MEMS based Monolithic Michelson interferometer with both the movable mirror and fixed mirror vertically oriented and integrated on a silicon bench for the first time. Both mirrors are single-crystal silicon based and their vertical orientation is attained by a proper thermal bimorph design and a unique stopper mechanism. This device enables miniature Fourier transform spectrometers.