Time-of-Flight Secondary Ion Mass Spectrometry profiling for arsenic in silicon dioxide matrix

This paper showed that
⁷⁵
As was a better analyte species than
²⁸
Si
⁷⁵
As in silicon dioxide for accurate quantitative profiling by Time-Of-Flight Secondary Ion Mass Spectrometry. Contrary to silicon matrix, the ion yield of
⁷⁵
As showed 1 order higher than
²⁸
Si
⁷⁵
As in silicon dioxide matrix. The average RSF for
⁷⁵
As in silicon dioxide was determined to be 5.62E20 and lower variation of
⁷⁵
As RSF was observed.