Development of an electrothermal micro positioning platform for laser targets with two degrees of freedom

This work presents the development of an electrothermal actuated micro positioning platform with two degrees of freedom for use in pump-probe-experiments. The platform consists of a monolithic kinematic system, actuated by local thermal expansion due to defined Joule heating. Samples are manufactured with UV-Lithography of SUEX
^™
dry films for the polymer body and metallic thin films for the heating elements. Characterization of the samples shows deflections up to 177 μm × 119 μm. Controlling the actuators driving power allows a positioning accuracy of less than 5 μm.