Fabrication of high frequency ultrasonic transducer arrays using physical vapor deposition [for in vivo imaging]

Creare is developing microfabrication techniques to manufacture low-cost, multi-dimensional ultrasonic transducer arrays with single- and multi-layer piezoelectric elements. The fabrication approach is scaleable for manufacturing arrays in the frequency range of 10-500 MHz in dense or sparse array designs. Our approach employs the following processes: (1) high-rate physical vapor deposition (sputtering) of high-quality piezoelectric films using reactive sputtering of a metallic target and (2) photolithography and masking to provide the interlayer electrodes. This transducer technology has the potential to provide new tools to the clinician which should enable higher resolution ultrasound imaging and miniaturization of ultrasound arrays for in vivo imaging.