Measurement of the frequency dependence of standard capacitors in the frequency range 10 kHz to 1 MHz

A measurement of frequency dependence of three-terminal fused-silica and nitrogen gas standard capacitors of value 1 pF, 10 pF, 100 pF and 1000 pF, in the range of 10 kHz to 1 MHz is presented. The frequency dependencies of these standard capacitors are measured using a direct substitution method with the NIMT capacitance reference standards. The results show similar trends: first the capacitances change slightly from frequency of 10 kHz to 200 kHz, then increase significantly from frequency 200 kHz to 1 MHz for all standard capacitors. This paper also addresses expanded uncertainties of these standard capacitors.