Development of a programmable small capacitance standard at LNE

A programmable small capacitance standard consisting of several capacitors connected to a 20 channels multiplexer has been developed at LNE. This programmable standard is capable of producing decadic capacitances from 10 aF to at least 10 fF. This paper presents the first phase of the measurements which were performed in order to evaluate the errors introduced by the stray and cross capacitances.