A novel transient simulation for 3D multilevel interconnections on complex topography

An efficient method is presented to model the transient characteristics of distributed resistor-capacitor of ULSI multilevel interconnections on complex topography, in which the reformulation of the boundary-element method (BEM) and the Pade-via-Lanczos (PVL) algorithm associated with multilayer Green's function can avoid the redundant works on both volume mesh and transient analysis associated with the finite-difference method. An adaptive multilayer Green's function is adopted to investigate several cases that have revealed interesting physical mechanisms in charge transfer between conductors on multilayer topography. To improve the timing analysis efficiency of the finite-difference method, the dominant poles are obtained by introducing the PVL algorithm for model-order reduction. Hence, it is easy to calculate the transient characteristics of both parallel conductors and complicated configurations such as crossing lines, corners, contacts, multilayers, and their combinations.