Run-to-run control for semiconductor manufacturing processes using extended state observer

The state estimation is one of the challenge issues in the semiconductor manufacturing processes, which can improve the Run-to-Run control (R2R). To achieve a good performance on the state estimation, the Extended State Observer (ESO) is integrated into R2R control in this paper. Firstly, the basic principle of ESO is introduced. Then, the disturbances estimation in R2R control is developed using the discrete ESO. Finally, the proposed method is evaluated by numerical examples.