Comparison of ultrashort-pulse-laser ablation characteristics for different ceramics

This paper analytically investigates the ultrashort-pulse-laser ablation characteristics for different ceramics. Ceramics processing is difficult due to its hard and brittle properties. Noncontact ultrashot-pulse-laser is widely recognized to be a applicable tool. The optical property, thermal conductivity, and thermal expansion coefficient of AhO
₃
Ceramics are obviously different from these of AlN ceramics and are significantly relevant to the ablation characteristics of these ceramics. Therefore, the ablation for Al
₂
O
₃
and AlN ceramics is quantitatively analyzed in this study. The effects of the ceramics properties on the ablation characteristics are discussed by comparing the ablation of Al
₂
O
₃
with AlN.