Structural and electrical properties of sol-gel synthesized PLZT thin films

Thin films of PLZT with PbTiO/sub 3/ interlayers have been fabricated by using a sol-gel spin-on process. Three compositions of PLZT, namely 8/65/35, 15/40/60 and 18/30/70, have been deposited on platinum and quartz substrates and heat treated at 650/spl deg/C. All three compositions have crystallized in the perovskite phase. The 8/65/35 composition, which has been investigated in greater detail exhibits a low value of leakage current. It also exhibits polarization hysteresis, with E/sub c/=20 kV/cm and P/sub r/=25 /spl mu/C/cm/sup 2/.