Fabrication and experimentation of vertical spring-type micromirror using shielding screen structure

A vertical spring-type micromirror was fabricated using a shielding screen structure. Unlike the micromirror that was fabricated using only shadow evaporation, the fabricated vertical springs in this case are well defined, using both shadow evaporation and a shielding screen structure. The static and dynamic characteristics of micromirror are measured by means of contact-free optical measurement system. The downward threshold voltage is 16 V and the step response time is 16.8 /spl mu/s. Images are projected onto a screen using a simple projection system with the fabricated micromirror array.