Surface micromachined segmented mirrors for adaptive optics

This paper presents recent results for aberration correction and beam steering experiments using polysilicon surface micromachined piston micromirror arrays. Microfabricated deformable mirrors offer a substantial cost reduction for adaptive optic systems. In addition to the reduced mirror cost, microfabricated mirrors typically require low control voltages (less than 30 V), thus eliminating high-voltage amplifiers. The greatly reduced cost per channel of adaptive optic systems employing microfabricated deformable mirrors promise high-order aberration correction at low cost. Arrays of piston micromirrors with 128 active elements were tested. Mirror elements are on a 203-/spl mu/m 12/spl times/12 square grid (with 16 inactive elements, four in each corner of the array). The overall array size is 2.4 mm square. The arrays were fabricated in a commercially available surface micromachining process. The cost per mirror array in this prototyping process is less than $200. Experimental results are presented for a hybrid correcting element comprised of a lenslet array and piston micromirror array, and for a piston micromirror array only. Also presented is a novel digital deflection micromirror that requires no digital to analog converters, further reducing the cost of adaptive optics systems.