Design and electro-thermal analysis of a platinum micro heater for gas sensors

Micro Hotplate (MHP) is the key component in micro-sensors particularly gas sensors. In this paper, we have presented the design and simulation results of a meander micro heater based on platinum material. A comparative study by simulating two different heater thicknesses has also been presented in this paper. The membrane size is 1.4mm × 1.6mm and a thickness of 1.4μm. Above the membrane, a platinum film was deposed with a size of 1.1 × 1.1 mm and a various thickness of 0.1 μm and 0.15 μm. Power consumption and temperature distribution were determined in the Platinum micro heater's structure over a supply voltage of 5, 6 and 7 V.