Polymer-based electrospray chips for mass spectrometry

In this paper, we present our development of a MEMS chip with an overhanging polymer microcapillary 2.5 mm in length and with a 5 /spl mu/m/spl times/10 /spl mu/m orifice size at the tip. The fabricated chips have been successfully interfaced with a mass spectrometer (MS) to validate electrospray ionization (ESI) for biochemical analysis. The prediction of a reduction in Taylor cone size has also been observed with real time ESI fluid visualization from our chip. Built-in micro particle filters and centimeter long serpentine microchannels were fabricated on the chip with a low temperature process by using the Parylene polymer as a structural material, aluminum and photoresist as sacrificial layers, and bromine trifluoride (BrF/sub 3/) gas phase etching for final microcapillary releasing. The use of an overhanging polymer structure adds a new a level of mechanical robustness that was never achievable with other thin films. Functionality of our device was proven by consistent detection of myoglobin in a 200 nM solution at a flow rate of 35 nL/min and a voltage potential of 1.5 kV. This MS interface chip represents vital and significant improvements in MEMS process technology and MS functionality with respect to the silicon nitride (Si/sub x/N/sub y/) ESI nozzles previously reported.