Analysis of Multilayered Co-Zr-Nb Film On-Chip Noise Suppressor as a Function of Resistivity and Permeability

Near-field noise suppression and conduction losses in a multilayered, amorphous, Co-Zr-Nb thin film with uniaxial anisotropy were simulated and measured with a microstrip line. A 16 dB magnetic near-field shielding effectiveness at 1.1 GHz and a maximum conduction loss around 2.1 GHz were obtained. Eddy-current and ferromagnetic-resonance (FMR) losses were considered as major contributors to near-field noise suppression around 1 GHz. These losses were numerically analyzed by controlling film resistivity and frequency-dependent complex permeability. The degree of shielding effectiveness was significantly controlled by the eddy-current loss. The frequency of the maximum near-field suppression was dominated by the FMR frequency.