A modular integrated pressure control unit for gases

A new concept for application specific realization of micropneumatical systems will be presented for the first time. It allows the modular integration of micromechanical valves (2-way, 3-way) and sensors (pressure, flow, etc.) for creating closed loop systems having minimized dead volume and response time. Following the smallest industrial standard size of pneumatic valves, the width of each component housing is fixed to 10 mm. The concept for modular integration has been successfully proved by building up a pressure control unit for gases. It basically consists of a microprocessor for digital control, two electrostatically actuated microvalves, electronics to drive the valves and a pressure sensor.