Temperature control of an SThM micro-probe with an heat source estimator and a lock-in measurement

In view of qualitative temperature measurement by scanning thermal microscopy, we introduce a model-based control law for a new microfabricated probe. The underlying model is the time-space two-scale electro-thermal model presented in [15], since it has the power to represent transcients of harmonic modulations. The control method accounts for an estimation of the heat source in the sample and for the delay in the lock-in filter based observation. Experiment-based model calibration is a prerequisite and is discussed in detail.