Bipolar Resistive RAM Based on ${\rm HfO}_{2}$: Physics, Compact Modeling, and Variability Control

In this paper, we thoroughly investigate the characteristics of the TiN/Ti/HfO
₂
/TiN resistive random access memory (RRAM) device. The physical mechanisms involved in the device operations are comprehensively explored from the atomistic standpoint. Self-consistent physics simulations based on a multi-scale approach are employed to achieve a complete understanding of the device physics. The latter includes different charge and ion transport phenomena, as well as structural modifications occurring during the device operations. The main sources of variability are also included by connecting the electrical response of the device to the atomistic material properties. The detailed understanding of the device physics allows developing a physics-based compact model describing the device switching in different operating conditions, including also the effects of cycling variability. Random telegraph noise (RTN), which constitutes an additional variability source, and its relations with cycling variability are analyzed. A statistical link between the programmed resistance and the worst-case RTN effect is found and exploited to include RTN effects in the compact model. Finally, we show how implementing an advanced programming scheme tailored on the device physics allows optimal control over variability and RTN, eventually achieving reliable and RTN-resilient two-bits/cell operations.