Recursive Identification of Micropositioning Stage Based on Sandwich Model With Hysteresis

In this brief, a recursive identification method for a micropositioning stage with piezo actuators is proposed. This method utilizes a sandwich model for describing nonlinear dynamics of the stage. In this model, both power amplifier with filtering circuit and the flexure hinge with load are described by linear dynamic submodels, respectively, whereas a Duhem hysteresis submodel is employed for describing the performance of the piezo actuator. An extended recursive identification algorithm is proposed for estimating the corresponding parameters of the sandwich model, and the convergence of the proposed algorithm is analyzed. Finally, the experimental results of a real positioning stage with piezo actuators are presented and discussed.