Microwave and structural properties of barium strontium titanate films grown under different technological conditions

The structural properties of ferroelectric barium strontium titanate films deposited at different temperatures and electrical parameters of related tunable capacitors were investigated before and after an annealing in oxygen atmosphere at different temperatures. It has been shown that both deposition and annealing temperature directly affect the phase and component composition of the films, crystal lattice parameters, and crystallite size. The noticeable impact of the annealing operation on structure properties of the films and microwave parameters of the capacitors was observed at the annealing temperatures higher than the deposition one.