A CMOS-compatible oscillation-mode optomechanical DC accelerometer at 730-ng/Hz1/2 resolution

Here we present an optomechanical accelerometer with DC resolution at 730ng/Hz1/2 that when driven into sustained-oscillation mode, the slot photonic crystal cavity provides a radio-frequency (RF) readout of the optically-driven transduction with an enhanced sensitivity of 196 ng/Hz of RF shift. This advanced sensitivity as well as the solid-state room-temperature silicon architecture make the DC accelerometer robust for portability and field deployment.