Electrical thermal acoustic point source based on mems technology

This work demonstrated, for the first time, an electro-thermoacoustic (ETA) point source based on Point-Contact-Structure (PCS) realized by MEMS technology based on suspended aluminum nanowires. The novel type of device improves the performance at low frequency down to 500 Hz, enhances the efficiency of ETA device by over 7 folds and widen the 3 dB range of low frequency range comparing to conventional suspended aluminum nanowires (AW) ETA devices. The highest sound pressure level (SPL) achieved by PCS acoustic device is 67 dB at 1 cm with 74 mW AC input. The novel device works in a less than ± 3 dB fluctuation mode which is realized by the enhancement of SPL at low frequency.