Molecular electronic transducer based planetary seismometer with new fabrication process

This paper describes a novel design and implementation of a short period seismometer based on molecular electronic transducer (MET) for the purpose of planetary exploration. A silicon on insulator (SOI)-based micro-fabrication is employed to reduce the hydraulic impedance of microfluidic channels in a MET device, resulting in improved noise floor and sensitivity. The resolution reached 1.78×10
^-7
(m/s
²
)/√Hz at 1.2 Hz with the sensitivity of 2500V/(m/s
²
).