Arraying SH0 Lithium Niobate laterally vibrating resonators for mitigation of higher order spurious modes

This paper studies the origin of higher-order spurious modes in shear horizontal (SH0) mode Lithium Niobate (LiNbO3) laterally vibrating resonators (LVRs). Near-zero spurious mode response and a high figure of merit (FoM) of 154 have been achieved concurrently by arraying single resonators with only two electrodes at the orientation of 10° to -Y axis in the X-cut plane. The high FoM (154) results from a high electromechanical coupling (kt2) of 14.1% and quality factor (Q) of 1093. In contrast to a conventional resonator with multiple (> 2) interdigitated electrodes, the fabricated resonator array exhibits an unprecedented spectral range of spurious-free response, 320% centered about the resonance, thus further advancing the LiNbO3 LVR technology toward the wireless marketplace.