Magnetic thin-film inductors for monolithic integration with CMOS

This paper presents the fabrication, design and electrical performance of magnetic thin-film inductors for monolithic integration with CMOS for DC-DC power conversion. Magnetic core inductors were fabricated using conventional CMOS processes to achieve peak inductance density of 290nH/mm2, quality factor 15 at 150MHz, current density exceeding 11 A/mm2 and coupling coefficient of 0.89 for coupled inductors.