Setting Parameters Influence on Accuracy and Stability of Near-Field Scanning Microwave Microscopy Platform

In this paper, the impact of different setting parameters on the performance of a microwave microscope is evaluated. This study is performed on a homemade near-field scanning microwave microscope built up with a conventional vector network analyzer and a vertical coaxial evanescent probe. A broadband matching network based on an interferometric technique is inserted between the analyzer and the probe to enhance the measurement sensitivity/accuracy in the frequency range 2-20 GHz. The performance of the system in terms of measurement accuracy and stability is derived as a function of different setting parameters. Microwave surface imaging of subwavelength features is evaluated as a demonstration. This paper provides a guide for best practice in microwave microscopy.