Fabrication of Ge micro-disks on free-standing SiO2 beams for monolithic light emission

Realizing a germanium (Ge)-based monolithic light source requires high n-type doping, tensile strain, and an optical cavity. Here, we demonstrate the application of spin-on doping technique, and the use of free-standing structures to induce tensile strain on Ge micro-disks, which act as a simple micro-cavity.