Design and modeling of 1000ppi fingerprint sensor

In this paper, pixel design and device modeling of 1000ppi ultra high resolution fingerprint sensor is demonstrated by amorphous-Si TFT fabrication technology. Meanwhile, we present a new pixel design with additional metal layer which works as a storage capacitor and a light shielding layer simultaneously. With this additional metal layer, sensor area can be enlarged by 33% and storage capacitor can be enlarged by 84%. Simulated results show that our new pixel design can reach better charging level and output electrical performance. In addition, the larger sensor area and storage capacitor can improve sensor sensitivity and signal-to-noise ratio significantly.