Improvement of the chaotic response in MEMS with fuzzy control implemented by ANN

Even when the conditions to achieve robust chaotic response in nonlinear MEMS oscillators are verified, the attainment of the proper parameters for chaotic signal generation is not immediate. This paper presents for the first time a control method based on fuzzy logic and artificial neural networks to maximize the chaotic response, and tests its effectiveness through numerical simulations of a cc-beam MEMS resonator model designed in a commercial CMOS technology.