Membrane supported microwave circuits

The aim of the paper is to present the results obtained by our group in the very exciting field of micromachines structures dedicated to microwave circuits. The main results are: the manufacturing of dielectric membranes on high resistivity silicon substrates, as well as of thin GaAs membranes, the design, manufacturing and characterization of membrane supported distributed and lumped microwave circuit elements. This novel technology has promising prospects regarding the development of microwave and millimeter wave monolithic integrated circuits.