High speed diamond DUV-detectors

Diamond is an ideal material for solar blind DUV-detection below wavelengths of 225 nm. However, only a few experiments have been reported until now, mainly on polycrystalline statistically-oriented diamond films, using interdigitated finger structures (Jackman, 1996). Here, we report on diamond DUV detectors fabricated on highly oriented diamond (HOD) films on silicon as well as on single crystal diamond substrates. Planar MSM-structures, based on photoconduction, as well as the first vertical Schottky diode structures, based on carrier separation in the space charge region, were investigated.