Self-Assembled Quantum Dot Single Electron Devices

Single electron tunneling and its application to future VLSI systems has been an important subject extensively studied for the last decade [l]. Many types of materials and ideas have been applied to fabricate and implement single electron devices operating at high temperatures. The self-assembled quantum dot (SAQD) system is one of the attractive candidates for single electron devices since high quality Coulomb islands can be obtained in one-step growth processes. Furthermore, the characteristic energy scale of the devices would enhance because the quantum energy is expected to be added to the classical charging energy.