A study on improved electron emission characteristics of micro-patterned DLC films

DLC films have been grown on silicon substrates by pulsed Nd-YAG laser ablation using oscillating graphite target. Excellent field emission characteristics of the micro-patterned DLC films were obtained and columnar DLC structure showed high area density of emission sites and good field emission uniformity. These findings indicate that the patterned and particle-filtered DLC film has high potential as a cold cathode electron source for field emission display. Also emission characteristics of the DLC film after annealing at high temperature will be discussed together with the analysis of Raman spectroscopy.