Low pull-in voltage graphene nanoelectromechanical switches

In this work, we report double-clamped beam and cantilever graphene nanoelectromechanical (GNEM) switches with local top actuation electrode. The low pull-in voltage of below 5 V was realized in both of the switches, which is compatible with the conventional complementary metal-oxide-semiconductor circuit requirements. Additionally, the naturally formed chromium oxide was introduced at the contact interface to prevent the formation of chemical bonds between graphene and metal electrode. As consequence, the reversible switching operation was achieved.