Electron beam forming in MEMS-type electron gun

In this paper we discuss first realization and preliminary parameters of the electronoptics MEMS column equipped with a field-emitting electron gun and an Einzel lens. The column is made in a form of the sandwiched silicon stack. Silicon elements are deep wet micromachined and placed in a polymer 3D printed holder. Cathode is made of carbon nanotubes deposited by use of the electrophoretic process onto the bottom silicon part of the column.