Fast and reliable charge-trap non-volatile memories using low thermal budget processes in monolithic 3DIC application

We developed a low thermal budget NVM to exhibit a faster operation speed (1 μs) and a lower operation voltage (+9 V) with reliable retention and endurance. Accordingly, the NVM fabrication processes reduce the power consumption, and are compatible with the CMOS technology, facilitating the realization of monolithic SRAM/NVM in the future.