Feasibility study of TOF-SIMS surface measurement for Aluminum bond pad fluorine contamination

This paper elucidates the importance of ion-yield enhancement through primary-ion bombardment in ultra-high surface sensitive Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) measurements of Aluminum bond pad fluorine contamination. A good correlation is achieved, R
²
of 0.97, with Auger Electron Spectroscopy (AES) that is commonly used for bond pad surface contamination quantification.