A Pneumatically Actuated Micro Valve With A Silicone Rubber Membrane For Integration With Fluid-handling Systems

A valve concept with a silicone rubber membrane has been demonstrated in silicon micromachining technology. The extreme flexibility of the silicone rubber membrane makes it possible to fabricate very small valves with a minimum of dead volume and a large opening. Valves with a membrane design of 225 /spl mu/m x 125/spl mu/m and valve seats with a length of 10 /spl mu/m have been fabricated. A pressure drop on a water flow with open valves of 100 Pa//spl mu/l/min has been measured. No leakage at all could be detected. The valve system has been tested to withstand up to 500 KPa pressure difference over the membrane.