Ultrathin flexible and optically tunable terahertz bandpass filter with embedded silicon

A new fabrication technique for ultra-thin, flexible and optically tunable terahertz metamaterials with embedded silicon is presented. The implemented bandpass filter had a subwavelength thickness of 25 μm and provided a quasi-etalon free maximal amplitude transmission of 80 %. By optical tuning with a 500 mW strong modulation laser an amplitude modulation depth of 94 % was achieved at 0.65 THz.