Investigation of a broadband micromachined thermoelectric microwave power sensor with a cantilever beam

This paper reports a novel thermoelectric microwave power sensor with a MEMS cantilever beam in order to improve the measurement dynamic range and the band width. The measured results show that the MEMS cantilever beam can improve the dynamic range by increasing the top end of the range into no less than 200mW, and enhance the band width by increasing the top end of the range into no less than 36GHz.