MEMS endomicroscope for simultaneous bright-field microscopy and optical coherence tomography

We present the first silicon-based endomicroscope that combines wide field and confocal imaging modalities in a single device, whose functionality includes simultaneous operation of bright-field microscopy and optical coherence tomography (OCT). This highly-compact multi-modal probe is based on silicon bulk micromachining and has cross-sectional dimensions of 2×2.76mm
²
. The achieved lateral resolutions are 6.2 μm and 17.8 μm for bright-field microscopy and OCT, respectively.