On-chip ovenization of encapsulated Disk Resonator Gyroscope (drg)

This paper reports, for the first time, a single-chip ovenization of a fully-encapsulated MEMS gyroscope to improve the stability of the scale factor and bias. We use the frequency output of the gyroscope as a thermometer, and, in turn heat the device through an on-chip silicon heater defined in the encapsulation layer. During temperature-controlled operation, the scale factor holds constant and the bias remains less than 1°/s, even as external temperature changed from 0-80°C.