Coupled circuit, field and temperature model of an induction plasma installation

A high frequency (HF) induction plasma installation is studied. An analytical model of the generator using optimization is coupled to a voltage driven model of the plasma. The electromagnetic equation of the system is solved by coupling the moment method (MM), the boundary integral method (BIM) and the finite difference method (FDM). The results are used to calculate the temperature distribution inside the plasma using the control volume method (CVM). A hierarchical algorithm is introduced to orchestrate the exchange between the sub-systems. The magnetic field and the temperature inside the plasma are measured by water cooled probes to validate the model.